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P+/N Junction Formation in Thin Strain Relaxed Buffer Strained Silicon Substrates: The Effect of the Junction Anneal

Author(s):
Eneman, G.
Simoen, E.
Delhougne, R.
Verheyen, P.
Simons, V.
Loo, R.
Caymax, M.
De Meyer, K.
Vandervorst, W.
Claeys, C.
5 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-06
Pub. Year:
2005
Page(from):
338
Page(to):
348
Pages:
11
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774642 [1566774640]
Language:
English
Call no.:
E23400/200506
Type:
Conference Proceedings

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