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Integration of HMOSTM Flash Memory in a 90 nm CMOS Technology

Author(s):
De Vos, J.
Haspeslagh, L.
Demand, M.
Redolfi, A.
Baerts, C.
Beckx, S.
Vleugels, F.
Van Houdt, J.
3 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-06
Pub. Year:
2005
Page(from):
306
Page(to):
315
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774642 [1566774640]
Language:
English
Call no.:
E23400/200506
Type:
Conference Proceedings

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