Wafer Scale Packaging of MEMS by Using Plasma Activated Wafer Bonding
- Author(s):
Suni, T. Henttinen, K. Lipsainen, A. Dekker, J. Luoto, H. Kulawski, M. - Publication title:
- Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2005-02
- Pub. Year:
- 2005
- Page(from):
- 173
- Page(to):
- 183
- Pages:
- 11
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774604 [1566774608]
- Language:
- English
- Call no.:
- E23400/200502
- Type:
- Conference Proceedings
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