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Gas Source Molecular Beam Epitaxy Studies of the Initial Stages of Diamond and Silicon Carbide Growth using Methyl Radicals and Molecular Hydrocarbon Species

Author(s):
Publication title:
AIChE 1999 ANNUAL MEETING
Title of ser.:
AIChE meeting [papers]
Ser. no.:
1999
Pub. Year:
1999
Paper no.:
170t
Pages:
9
Pub. info.:
New York: American Institute of Chemical Engineers
Language:
English
Call no.:
A08000
Type:
Conference Proceedings

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