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Thin Film Processing and Surface/Interface Modification for Integrated Circuit Fabrication

Author(s):
Hess, Dennis W. ( Georgia Tech, Atlanta, GA )  
Publication title:
AIChE 1999 ANNUAL MEETING
Title of ser.:
AIChE meeting [papers]
Ser. no.:
1999
Pub. Year:
1999
Paper no.:
168a
Pages:
2
Pub. info.:
New York: American Institute of Chemical Engineers
Language:
English
Call no.:
A08000
Type:
Conference Proceedings

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