Solution Delivery for Copper CVD Using Cu(hfac)2 Reduction
- Author(s):
- Borgharkar, Narendra S. ( Louisiana State University, Baton Rouge, LA )
- Fan, Hui ( Louisiana State University, Baton Rouge, LA )
- Griffin, Gregory L. ( Louisiana State University, Baton Rouge, LA )
- Maverick, Andrew W ( Louisiana State University, Baton Rouge, LA )
- Publication title:
- AIChE 1998 ANNUAL MEETING
- Title of ser.:
- AIChE meeting [papers]
- Ser. no.:
- 1998
- Pub. Year:
- 1998
- Paper no.:
- 210e
- Pages:
- 6
- Pub. info.:
- New York: American Institute of Chemical Engineers
- Language:
- English
- Call no.:
- A08000
- Type:
- Conference Proceedings
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