Solution Delivery for Copper CVD Using Cu(hfac)2 Reduction

Solution Delivery for Copper CVD Using Cu(hfac)2 Reduction

Author(s):

Borgharkar, Narendra S. ( Louisiana State University, Baton Rouge, LA )
Fan, Hui ( Louisiana State University, Baton Rouge, LA )
Griffin, Gregory L. ( Louisiana State University, Baton Rouge, LA )
Maverick, Andrew W ( Louisiana State University, Baton Rouge, LA )

Publication title:

AIChE 1998 ANNUAL MEETING

Title of ser.:

AIChE meeting [papers]

Ser. no.:

1998

Pub. Year:

1998

Paper no.:

210e

Pages:

6

Pub. info.:

New York: American Institute of Chemical Engineers

Language:

English

Call no.:

A08000

Type:

Conference Proceedings

Details

TDL ID:	ZA00015168
Series ID:	PA00000179
Conf. info. (Name):	AIChE Annual Meeting
Conf. info. (Number):	1998
Conf. info. (Venue):	Miami Beach, FL, USA
Conf. info. (Date):	1998.11.15-1998.11.20
Note for article:	Fiche 117

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