Process Monitoring of Plasma Etch Systems
- Author(s):
- Bushman, S. ( University of Texas at Austin; SEMATECH, Austin, TX )
- Edgar, T.F. ( University of Texas at Austin; SEMATECH, Austin, TX )
- Trachtenberg, I. ( University of Texas at Austin; SEMATECH, Austin, TX )
- Wiiliams, N. ( University of Texas at Austin; SEMATECH, Austin, TX )
- Publication title:
- AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California
- Title of ser.:
- AIChE meeting [papers]
- Ser. no.:
- 1994
- Pub. Year:
- 1994
- Paper no.:
- 12d
- Pages:
- 7
- Pub. info.:
- New York: American Institute of Chemical Engineers
- Language:
- English
- Call no.:
- A08000/950031
- Type:
- Conference Proceedings
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