Dynamic Modelling of Moisture Transport and Surface Interactions in Ultrahigh-Purity Gas Delivery Systems
- Author(s):
- Coronell, D.G. ( Air Products & Chemicals, Inc., Allentown, PA )
- Johnson, A.D. ( Air Products & Chemicals, Inc., Allentown, PA )
- Chen, M.S.K. ( Air Products & Chemicals, Inc., Allentown, PA )
- Publication title:
- AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California
- Title of ser.:
- AIChE meeting [papers]
- Ser. no.:
- 1994
- Pub. Year:
- 1994
- Paper no.:
- 10e
- Pages:
- 7
- Pub. info.:
- New York: American Institute of Chemical Engineers
- Language:
- English
- Call no.:
- A08000/950031
- Type:
- Conference Proceedings
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