Relationships Between Process Fundamentals, Facility Design and Production Control of Semiconductor Manufacturing Systems
- Author(s):
- Hase, R.C. ( Purdue University, West Lafayette, IN )
- Burgos, M.C. ( Purdue University, West Lafayette, IN )
- Chen, S. ( Purdue University, West Lafayette, IN )
- Uzsoy, R. ( Purdue University, West Lafayette, IN )
- Takoudis, C.G. ( Purdue University, West Lafayette, IN )
- Publication title:
- AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California
- Title of ser.:
- AIChE meeting [papers]
- Ser. no.:
- 1994
- Pub. Year:
- 1994
- Paper no.:
- 8d
- Pages:
- 7
- Pub. info.:
- New York: American Institute of Chemical Engineers
- Language:
- English
- Call no.:
- A08000/950031
- Type:
- Conference Proceedings
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