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On The Two-Dimensional Transfer Model for Silicon LPCVD Parallel-Flow Reactor

Author(s):
Publication title:
AIChE SPRING MEETING -NEW ORLEANS, LA -03/29/92- 04/02/92
Title of ser.:
AIChE meeting [papers]
Ser. no.:
1992
Pub. Year:
1992
Paper no.:
45d
Pages:
13
Pub. info.:
New York: American Institute of Chemical Engineers
Language:
English
Call no.:
A08000
Type:
Conference Proceedings

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