THE RECOVERY AND RECYCLING OF HIGH PURITY ARGON IN THE SEMICONDUCTOR INDUSTRY
- Author(s):
- O'Brien, J.V. ( Koch Process Systems, Inc. 20 Walkup Drive Westborough, MA 01581 )
- Schurter, R.V. ( Koch Process Systems, Inc. 20 Walkup Drive Westborough, MA 01581 )
- Publication title:
- AIChE SPRING NATIONAL MTG. -NEW ORLEANS, LA., MARCH 6-10, 1988
- Title of ser.:
- AIChE meeting [papers]
- Ser. no.:
- 1988
- Pub. Year:
- 1988
- Paper no.:
- 67c
- Pages:
- 19
- Pub. info.:
- New York: American Institute of Chemical Engineers
- Language:
- English
- Call no.:
- A08000
- Type:
- Conference Proceedings
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