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Molecular orientation control for thermal and UV-driven polymer MEMS actuators

Author(s):
Harris, K. D. ( Technische Univ. Eindhoven (Netherlands) )
Cuypers, R. ( Phillips Research Labs. (Netherlands) )
Scheibe, P. ( Technische Univ. Eindhoven (Netherlands) )
Mol, G. N. ( Philips Research Labs. (Netherlands) )
Lub, J. ( Philips Research Labs. (Netherlands) )
Bastiaansen, C. W. M. ( Technische Univ. Eindhoven (Netherlands) )
Broer, D. J. ( Technische Univ. Eindhoven (Netherlands) and Philips Research Labs. (Netherlands) )
2 more
Publication title:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5836
Pub. Year:
2005
Page(from):
493
Page(to):
503
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458315 [0819458317]
Language:
English
Call no.:
P63600/5836
Type:
Conference Proceedings

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