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3D deformation analysis of flow and gas sensors membranes for reliability assessment

Author(s):
Sabate, N. ( Univ. de Barceiona (Spain) and Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany) )
Keller, J. ( Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany) )
Gollhardt, A. ( Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany) )
Vogel, D. ( Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany) )
Gracia, I. ( Ctr. Nacional de Microelectronica (Spain) )
Cane, C. ( Ctr. Nacional de Microelectronica (Spain) )
Morante, J. R. ( Univ. de Barcelona (Spain) )
Michel, B. ( Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany) )
3 more
Publication title:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5836
Pub. Year:
2005
Page(from):
416
Page(to):
424
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458315 [0819458317]
Language:
English
Call no.:
P63600/5836
Type:
Conference Proceedings

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