CAD tool environment for MEMS process design support
- Author(s):
- Schmidt, T. ( Univ. of Siegen (Germany) )
- Wagener, A. ( Univ. of Siegen (Germany) )
- Popp, J. ( Univ. of Siegen (Germany) )
- Hahn, K. ( Univ. of Siegen (Germany) )
- Bruck, R. ( Univ. of Siegen (Germany) )
- Publication title:
- Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5836
- Pub. Year:
- 2005
- Page(from):
- 318
- Page(to):
- 325
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458315 [0819458317]
- Language:
- English
- Call no.:
- P63600/5836
- Type:
- Conference Proceedings
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