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MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)

Author(s):
Villarroya, M. ( Univ. Autonoma de Barcelona (Spain) )
Verd, J. ( Univ. Autonoma de Barcelona (Spain) )
Teva, J. ( Univ. Autonoma de Barcelona (Spain) )
Abadal, G. ( Univ. Autonoma de Barcelona (Spain) )
Figueras, E. ( Institut de Microelectronica de Barcelona (Spain) )
Barniol, N. ( Univ. Autonoma de Barcelona (Spain) )
1 more
Publication title:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5836
Pub. Year:
2005
Page(from):
78
Page(to):
85
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458315 [0819458317]
Language:
English
Call no.:
P63600/5836
Type:
Conference Proceedings

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