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Optical and structural characterization of as-deposited and annealed ZrO2 thin films obtained by PIAD

Author(s):
Publication title:
Opto-Ireland 2005: Optical Sensing and Spectroscopy
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5826
Pub. Year:
2005
Page(from):
371
Page(to):
378
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458117 [0819458112]
Language:
English
Call no.:
P63600/5826
Type:
Conference Proceedings

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