EUV laser produced plasma source development for lithography (Invited Paper)
- Author(s):
Hayden, P. ( Univ. College Dublin (Ireland) ) Sheridan, P. ( Univ. College Dublin (Ireland) ) O'Sullivan, G. ( Univ. College Dublin (Ireland) ) Dunne, P. ( Univ. College Dublin (Ireland) ) Gaynor, L. ( Univ. College Dublin (Ireland) ) Murphy, N. ( Univ. College Dublin (Ireland) ) Cummings, A. ( Univ. College Dublin (Ireland) ) - Publication title:
- Opto-Ireland 2005: Optical Sensing and Spectroscopy
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5826
- Pub. Year:
- 2005
- Page(from):
- 154
- Page(to):
- 164
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458117 [0819458112]
- Language:
- English
- Call no.:
- P63600/5826
- Type:
- Conference Proceedings
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