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A novel integrated system for analysis of thermal depth profiles

Author(s):
  • Bante, J. ( Ctr. de Investigacion y de Estudios Avanzados del IPN (Mexico) )
  • Murray, C. ( Dutcher J. R., Univ. of Guelph (Canada) )
  • Alvarado-Gil, J. J. ( Ctr. de Investigacion y de Estudios Avanzados del IPN (Mexico) )
Publication title:
Eighth International Symposium on Laser Metrology : macro-, micro-, and nano-technologies applied in science, engineering, and industry : 14-18 February, 2005, Merida, Yucatan, Mexico
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5776
Pub. Year:
2005
Page(from):
485
Page(to):
492
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457578 [0819457574]
Language:
English
Call no.:
P63600/5776
Type:
Conference Proceedings

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