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Thermal stability of metal containing diamond-like carbon thin film fabricated by dual plasma deposition (invited Paper)

Author(s):
Fu, R. K. Y. ( City Univ. of Hong Kong (Hong Kong China) )
Mei, Y. F. ( City Univ. of Hong Kong (Hong Kong China) )
Fu, M. Y. ( City Univ. of Hong Kong (Hong Kong China) )
Wei, C. B. ( City Univ. of Hong Kong (Hong Kong China) )
Siu, G. G. ( City Univ. of Hong Kong (Hong Kong China) )
Chu, P. K. ( City Univ. of Hong Kong (Hong Kong China) )
Cheung, W. Y. ( Chinese Univ. of Hong Kong (Hong Kong China) )
Wong, S. P. ( Chinese Univ. of Hong Kong (Hong Kong China) )
3 more
Publication title:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5774
Pub. Year:
2004
Page(from):
330
Page(to):
335
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
Language:
English
Call no.:
P63600/5774
Type:
Conference Proceedings

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