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Nanoscale deformation measurements for reliability analysis of sensors

Author(s):
  • Keller, J. ( Fraunhofer Institute for Reliability and Microintegration(Germany), AMIC Angewandte Micro-Messtechnik GmbH(Germany) )
  • Gollhard, A. ( Fraunhofer Institute for Reliability and Microintegration(Germany) )
  • Vogel, D. ( Fraunhofer Institute for Reliability and Microintegration(Germany) )
  • Michel, B. ( Fraunhofer Institute for Reliability and Microintegration(Germany) )
Publication title:
Advanced sensor technologies for nondestructive evaluation and structural health monitoring : 8-10 March 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5770
Pub. Year:
2005
Page(from):
160
Page(to):
167
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457516 [0819457515]
Language:
English
Call no.:
P63600/5770
Type:
Conference Proceedings

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