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A scanning laser source and a microcantilever ultrasound receiver for detection of surface flaws in microdevices

Author(s):
Publication title:
Health monitoring and smart nondestructive evaluation of structural and biological systems IV : 7-9 March 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5768
Pub. Year:
2005
Page(from):
185
Page(to):
195
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457493 [0819457493]
Language:
English
Call no.:
P63600/5768
Type:
Conference Proceedings

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