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FIB based measurements for material characterization on MEMS structures

Author(s):
Vogel, D. ( Fraunhofer Institute for Reliability and Microintegration(Germany) )
Lieske, D. ( Fraunhofer Institute for Reliability and Microintegration(Germany) )
Gollhardt, A. ( Fraunhofer Institute for Reliability and Microintegration(Germany) )
Keller, J. ( Fraunhofer Institute for Reliability and Microintegration(Germany) )
Sabate, N. ( Univ. Barcelona(Spain) )
Morante, J. R. ( Univ. Barcelona(Spain) )
Michel, B. ( Fraunhofer Institute for Reliability and Microintegration(Germany) )
2 more
Publication title:
Testing, Reliability, and Application of Micro- and Nano-Material Systems III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5766
Pub. Year:
2005
Page(from):
60
Page(to):
69
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457479 [0819457477]
Language:
English
Call no.:
P63600/5766
Type:
Conference Proceedings

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