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Integrated charge and position sensing for feedback control of electrostatic MEMS

Author(s):
Anderson, R. C. ( Sandia National Labs. (USA) )
Kawade, B. ( Texas Tech Univ. (USA) )
Ragulan, K. ( Texas Tech Univ. (USA) )
Maithripala, D. H. S. ( Texas Tech Univ. (USA) )
Berg, J. M. ( Texas Tech Univ. (USA) )
Gale, R. O. ( Texas Tech Univ. (USA) )
Dayawansa, W. P. ( Texas Tech Univ. (USA) )
2 more
Publication title:
Smart structures and materials 2005 : Sensors and smart structures technologies for civil, mechanical, and aerospace systems : 7-10 March 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5765
Pub. Year:
2005
Page(from):
42
Page(to):
53
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457462 [0819457469]
Language:
English
Call no.:
P63600/5765-1
Type:
Conference Proceedings

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