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Feedback controlled nano-positioner using fiber optic EFPI sensor with novel demodulation technique

Author(s):
  • Park, S. -W. ( Korea Advanced Institute of Science and Technology(South Korea) )
  • Kim, D. -H. ( Univ. of California/Irvine(USA) )
  • Kim, C. -G. ( Korea Advanced Institute of Science and Technology(South Korea) )
Publication title:
Smart structures and materials 2005 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 7-10 March 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5763
Pub. Year:
2005
Page(from):
284
Page(to):
290
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457448 [0819457442]
Language:
English
Call no.:
P63600/5763
Type:
Conference Proceedings

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