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Synthetic defocus in interferometric lithography

Author(s):
Cropanese, F. C. ( Rochester Institute of Technology (USA) )
Bourov, A. ( Rochester Institute of Technology (USA) )
Fan, Y. ( Rochester Institute of Technology (USA) )
Zhou, J. ( Rochester Institute of Technology (USA) )
Zavyalova, L. ( Rochester Institute of Technology (USA) )
Smith, B. W. ( Rochester Institute of Technology (USA) )
1 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
3
Page(from):
1769
Page(to):
1779
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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