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The impact of illumination on feature fidelity for CPL mask technology

Author(s):
Kuijten, J. P. ( ASML (Netherlands) )
Verhappen, A. ( ASML (Netherlands) )
Conley, W. ( Freescale Semiconductor (USA) )
van de Goor, S. ( ASML (Netherlands) )
Litt, L. ( Freescale Semiconductor (USA) )
Wu, W. ( Freescale Semiconductor (USA) )
Lucas, K. ( Freescale Semiconductor (USA) )
Roman, B. ( Freescale Semiconductor (USA) )
Kasprowicz, B. ( Photronics (USA) )
Progler, C. ( Photronics (USA) )
Socha, R. ( ASML MaskTools (USA) )
van den Broeke, D. ( ASML MaskTools (USA) )
Wampler, K. ( ASML MaskTools (USA) )
Laidig, T. ( ASML MaskTools (USA) )
Hsu, S. ( ASML MaskTools (USA) )
10 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
3
Page(from):
1557
Page(to):
1561
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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