Assessment of 5-pole illumination for 65nm-node contact holes
- Author(s):
- Weisbuch, F. ( STMicroelectronics (France) )
- Warrick, S. ( Freescale Semiconducteurs SAS (France) )
- Conley, W. ( Freescale Semiconductor, Inc. (USA) )
- Depre, J. ( ASML (France) )
- Publication title:
- Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5754
- Pub. Year:
- 2005
- Pt.:
- 3
- Page(from):
- 1405
- Page(to):
- 1416
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457349 [0819457345]
- Language:
- English
- Call no.:
- P63600/5754
- Type:
- Conference Proceedings
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