Blank Cover Image

Improvement of the lifetime of the optical coatings under high power laser irradiations

Author(s):
Biro, R. ( Canon Inc. (Japan) )
Ito, T. ( Canon Inc. (Japan) )
Kuwabara, S. ( Canon Inc. (Japan) )
Fukushima, H. ( Canon Inc. (Japan) )
Akiba, H. ( Canon Inc. (Japan) )
Banno, K. ( Canon Inc. (Japan) )
Suzuki, Y. ( Canon Inc. (Japan) )
Otani, M. ( Canon Inc. (Japan) )
Sone, K. ( Canon Inc. (Japan) )
4 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
3
Page(from):
1304
Page(to):
1311
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Development of low-loss optical coatings for 157-nm lithography

Biro, R., Sone, K., Niisaka, S., Otani, M., Suzuki, Y., Ouchi, C., Saito, T., Hasegawa, M., Saito, J., Tanaka, A., …

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Effect of CAD on radiologists' responses in distinction between malignant and benign pulmonary nodules on high-resolution CT

Suzuki, K., Li, F., Aoyama, M., Shiraishi, J., Abe, H., Li, Q., Engelmann, R., Sone, S., MacMahon, H., Doi, K.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Development of the optical and infrared interferometer MIRA-I.2

Sato,K., Nishikawa,J., Yoshizawa,M., Fukushima,T., Machida,Y., Honma,Y., Kuwabara,R., Suzuki,S., Torii,Y., Kudo,K., …

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Via Electromigration Lifetime Improvement Of Aluminum Dual-Damascene Interconnects By Using Soft Low-k Organic SOG Interlayer Dielectrics

Kaneko, H., Usui, T., Ito, S., Hasunuma, M.

Materials Research Society
3 Conference Proceedings High-power injection lock laser platform for ArF dry/wet lithography

H. Mizoguchi, T. Inoue, J. Fujimoto, T. Yamazaki, T. Suzuki, T. Matsunaga, S. Sakanishi, M. Kaminishi, Y. Watanabe, T. …

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Femtosecond optical Kerr shutter switching in glass containing high concentration of Bi2O3

Sugimoto,N., Ito,S., Fujiwara,S., Suzuki,T., Kanbara,H., Hirao,K.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Model experiments of fast ignition with coaxial high-power laser beams

Fujita,K., Sunahara,A., Tanada,K.A., Izumi,N., Jitsuno,T., Miyanaga,N., Miyakoshi,T., Otani,H., Fukao,M., Heya,M., …

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Hydrogenation and Magnetic Properties of Pd/Co Multilayers

Suzuki, A., Kyuno, K., Akiba, E., Manago, T., Miyajima, H., Yamamoto, R.

MRS - Materials Research Society
5 Conference Proceedings Experimental study on ablative stabilization of Rayleigh-Taylor instability of laser-irradiated targets

Shigemori, K., Sakaiya, T., Otani, K., Fujioka, S., Nakai, M., Azechi, H., Shiraga, H., Tamari, Y., Okuno, K., Sunahara, …

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Quality measurements of Krf laser beams under high-repetition-rate operation with advanced high-speed photography: preparatory experiments

K. Kasuya, T. Suzuki, S. Matsuno, M. Watanabe, Y. Kawakita

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Optical fiber imaging laser radar

Akiyama, A., Watanabe, T., Doshida, M., Kanda, K., Kakimoto, Y., Yasuo, H., Kuwabara, M., Kumagai, H., Ishii, H.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Positron Annihilation Lifetime Measurement in Supercritical Fluid of N2O

Funakoshi, K., Kino, Y., Sekine, T., Kudo, H., Ito, Y., Suzuki, T.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12