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Properties of ultra-large CaF2 crystals for the high NA optics

Author(s):
Hatanaka, Y. ( Tokuyama Corp. (Japan) )
Yanagi, H. ( Tokuyama Corp. (Japan) )
Nawata, T. ( Tokuyama Corp. (Japan) )
Inui, Y. ( Tokuyama Corp. (Japan) )
Mabuchi, T. ( Tokuyama Corp. (Japan) )
Yasumura, K. ( Tokuyama Corp. (Japan) )
Nishijima, E. ( Tokuyama Corp. (Japan) )
Fukuda, T. ( IMRAM, Tohoku Univ. (Japan) )
3 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
3
Page(from):
1279
Page(to):
1284
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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