Blank Cover Image

Influence of mask induced polarization effects on a pattern printability

Author(s):
Ishimaru, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Matsuura, S. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Seki, M. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Fujii, K. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Koizumi, R. ( Canon Inc. (Japan) )
Hakataya, Y. ( Canon Inc. (Japan) )
Moriya, A. ( Canon Inc. (Japan) )
2 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
1
Page(from):
576
Page(to):
586
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

Similar Items:

Ishimaru, T., Matsuura, S., Seki, M., Fujii, K., Koizumi, R., Hakataya, Y., Moriya, A.

SPIE - The International Society of Optical Engineering

Yoshizawa,M., Moriya,S.

SPIE-The International Society for Optical Engineering

Itakura, Y., Kawasa, Y., Wakabayashi, O., Moriya, M., Nagai, S., Sumitani, A., Hagiwara, T., Ishimaru, T., Tsuji, S., …

SPIE - The International Society of Optical Engineering

Takahashi, K., Nakamura, T., Koizumi, M., Kano, H., Suzuki, S.

ESA Publications Division

Itakura, Y., Kawasa, Y., Wakabayashi, O., Moriya, M., Nagai, S., Sumitani, A., Hagiwara, T., Ishimaru, T., Tsuji, S., …

SPIE - The International Society of Optical Engineering

Itoh, M., Inoue, S., Okumura, K., Hagiwara, T., Moriya, J.

SPIE-The International Society for Optical Engineering

Huang, W. C., Lai, C. M., Luo, B., Tsai, C. K., Tsay, C. S., Lai, C. W., Kuo, C. C., Liu, R. G., Lin, H. T., Lin, B. J.

SPIE - The International Society of Optical Engineering

Sugawara, M., Ito, M., Chiba, A., Hoshino, E., Yamanashi, H., Hoko, H., Ogawa, T., Lee, B. T., Yoneda, T., Takahashi, …

SPIE-The International Society for Optical Engineering

Schilz,C.M., Eisner,K., Hien,S., Schleussner,T., Ludwig,R., Semmler,A.

SPIE-The International Society for Optical Engineering

Zibold, A., Stroessner, U., Poortinga, E., Schmid, R., Scherubl, T, Rosenkranz, N., Harnisch, W.

SPIE - The International Society of Optical Engineering

Hagiwara T, Tsuji S, Fujii, K, Moriya M, Wakabayashi O, Sumitani A, Saotp Y, Maeda K

SPIE - The International Society of Optical Engineering

S. Miyoshi, S. Yamaguchi, T. Hirano, H. Mashita, H. Mukai

Society of Photo-optical Instrumentation Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12