Complementary dipole exposure solutions at 0.29 k1
- Author(s):
Heumann, J. ( Advanced Mask Technology Ctr. (Germany) ) Schramm, J. ( Advanced Mask Technology Ctr. (Germany) ) Birnstein, A. ( Advanced Mask Technology Ctr. (Germany) ) Park, K. T. ( DPI/Advanced Mask Technology Ctr, (Germany) ) Witte, T. ( Advanced Mask Technology Ctr. (Germany) ) Morgana, N. ( Infineon Technologies AG (Germany) ) Hennig, M. ( Infineon Technologies AG (Germany) ) Pforr, R. ( Infineon Technologies AG (Germany) ) Thiele, J. ( Infineon Technologies AG (Germany) ) Schmidt, N. ( KLA-Tencor Corp. (USA) ) Aquino, C. ( KLA-Tencor Corp. (USA) ) - Publication title:
- Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5754
- Pub. Year:
- 2005
- Pt.:
- 1
- Page(from):
- 327
- Page(to):
- 338
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457349 [0819457345]
- Language:
- English
- Call no.:
- P63600/5754
- Type:
- Conference Proceedings
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