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Hyper-numerical aperture imaging challenges for 193 nm

Author(s):
Mizoguchi, H. ( Gigaphoton Inc. (Japan) )
Inoue, T. ( Ushio Inc. (Japan) )
Fujimoto, J. ( Komatsu Ltd. (Japan) )
Yamazaki, T. ( Komatsu Ltd. (Japan) )
Suzuki, T. ( Komatsu Ltd. (Japan) )
Matsunaga, T. ( Komatsu Ltd. (Japan) )
Sakanishi, S. ( Komatsu Ltd. (Japan) )
Kaminishi, M. ( Komatsu Ltd. (Japan) )
Watanabe, Y. ( Komatsu Ltd. (Japan) )
Ohta, T. ( Komatsu Ltd. (Japan) )
Nakane, M. ( Komatsu Ltd. (Japan) )
Moriya, M. ( Komatsu Ltd. (Japan) )
Nakaike, T. ( Komatsu Ltd. (Japan) )
Shinbori, M. ( Ushio Inc. (Japan) )
Yoshino, M. ( Ushio Inc. (Japan) )
Kawasuji, T. ( Komatsu Ltd. (Japan) )
Nogawa, H. ( Komatsu Ltd. (Japan) )
Ito, T. ( Komatsu Ltd. (Japan) )
Umeda, H. ( Komatsu Ltd. (Japan) )
Tanaka, S. ( Ushio Inc. (Japan) )
Taniguchi, H. ( Ushio Inc. (Japan) )
Sasaki, Y. ( Ushio Inc. (Japan) )
Kinoshita, J. ( Ushio Inc. (Japan) )
Abe, T. ( Ushio Inc. (Japan) )
Tanaka, H. ( Komatsu Ltd. (Japan) )
Hayashi, H. ( Komatsu Ltd. (Japan) )
Miyao, K. ( Ushio Inc. (Japan) )
Niwano, M. ( Komatsu Ltd. (Japan) )
Kurosu, A. ( Komatsu Ltd. (Japan) )
Yashiro, M. ( Ushio Inc. (Japan) )
Nagano, H. ( Ushio Inc. (Japan) )
Matsui, N. ( Komatsu Ltd. (Japan) )
Mimura, T. ( Komatsu Ltd. (Japan) )
Kakizaki, K. ( Ushio Inc. (Japan) )
Goto, M. ( Komatsu Ltd. (Japan) )
30 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
1
Page(from):
69
Page(to):
79
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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