Organosiloxane based bottom antireflective coatings for 193nm lithography

Organosiloxane based bottom antireflective coatings for 193nm lithography

Author(s):

Son, E.-K. ( Dongjin Semichem Co., Ltd. (Soufh Korea) )

Kim, J.-W. ( Dongjin Semichem Co., Ltd. (Soufh Korea) )

Lee, S.-H. ( Dongjin Semichem Co., Ltd. (Soufh Korea) )

Park, C.-S. ( Dongjin Semichem Co., Ltd. (Soufh Korea) )

Lee, J.-W. ( Dongjin Semichem Co., Ltd. (Soufh Korea) )

Kim, J. ( Dongjin Semichem Co., Ltd. (Soufh Korea) )

Lee, G.-S. ( Hynix Semlconductor Inc. (South Korea) )

Lee, S.-K. ( Hynix Semlconductor Inc. (South Korea) )

Ban, K.-D. ( Hynix Semlconductor Inc. (South Korea) )

Jung, J.-C. ( Hynix Semlconductor Inc. (South Korea) )

Bok, C. K. ( Hynix Semlconductor Inc. (South Korea) )

Moon, S.-C. ( Hynix Semlconductor Inc. (South Korea) )

7 more

Publication title:

Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5753(1)

Pub. Year:

2005

Pt.:

1

Page(from):

449

Page(to):

458

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457332 [0819457337]

Language:

English

Call no.:

P63600/5753-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00014977
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Metrology, Inspection, and Process Control for Microlithography
Conf. info. (Number):	2005 : 22th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.02.28-2005.03.02

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