Blank Cover Image

Development of optically transparent cyclic olefin photoresist binder resins

Author(s):
Publication title:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5753(1)
Pub. Year:
2005
Pt.:
1
Page(from):
149
Page(to):
161
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457332 [0819457337]
Language:
English
Call no.:
P63600/5753-1
Type:
Conference Proceedings

Similar Items:

Thirumala, V., Cao, H.B., Yueh, W., Choi, H., Golovkina, V., Wallace, J., Nealey, P.F., Thielman, D., Cerrina, F.

SPIE - The International Society of Optical Engineering

K. Choi, V. M. Prabhu, K. A. Lavery, E. K. Lin, W. Wu, J. T. Woodward, M. J. Leeson, H. B. Cao, M. Chandhok, G. Thompson

SPIE - The International Society of Optical Engineering

2 Conference Proceedings Quantification of EUV resist outgassing

Wang Yueh, Heidi B. Cao, Vani Thirumala, Hokkin Choi

SPIE - The International Society of Optical Engineering

Cao, H.B., Yueh, W., Rice, B.J., Roberts, J., Bacuita, T., Chandhok, M.

SPIE - The International Society of Optical Engineering

Chandhok, M., Cao, H., Yueh, W., Gullikson, E.M., Brainard, R.L., Robertson, S.A.

SPIE - The International Society of Optical Engineering

9 Conference Proceedings Patterning capabilities of EUV resists

Yueh, W., Cao, H.B., Chandhok, M., Lee, S., Shumway, M., Bokor, J.

SPIE - The International Society of Optical Engineering

Allen,R.D., Opitz,J., Wallow,T.I., DiPietro,R.A., Hofer,D.C., Jayaraman,S., Hullihan,K.A., Rhodes,L.F., Goodall,B.L., …

SPIE-The International Society for Optical Engineering

Raudenbusch, W.

American Chemical Society

Yoon,K.-S., Jung,D.-W., Lee,S., Lee,S.-H., Choi,S.-J., Woo,S.-G., Moon,J.-T.

SPIE-The International Society for Optical Engineering

Lee, C. -T., Jarnagin, N. D., Wang, M., Gonsalves, k. E., Robert, J. M., Yueh, W., Henderson, C. L.

SPIE - The International Society of Optical Engineering

Lavery, K. A., Choi, K.-W., Vogt, B. D., Prabhu, V. M., Lin, E. K., Wu, W., Satija, S. K., Leeson, M. J., Cao, H. B., …

SPIE - The International Society of Optical Engineering

Choi,S.-J., Jung,S.-Y., Kim,C.-H., Park,C.-G., Han,W.-S., Koh,Y.-B., Lee,M.-Y.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12