Precision carbon nanotube tip for critical dimension measurement with atomic force microscope
- Author(s):
Wies, C. ( AIXUV GmbH (Germany) ) Lebert, R. ( AIXUV GmbH (Germany) ) Jagle, B. ( AIXUV GmbH (Germany) ) Juschkin, L. ( AIXUV GmbH (Germany) ) Sobel, F. ( SCHOTT Lithotec AG (Germany) ) Seitz, H. ( SCHOTT Lithotec AG (Germany) ) Walter, R. ( SCHOTT Lithotec AG (Germany) ) Laubis, C. ( Physikalisch-Technische Bundesanstalt (Germany) ) Schoize, F. ( Physikalisch-Technische Bundesanstalt (Germany) ) Biel, W. ( Forschungszentrum Julich GmbH (Germany) ) Steffens, O. ( S&F NC-Systemtechnik GbR (Germany) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XIX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5752
- Pub. Year:
- 2005
- Page(from):
- 412
- Page(to):
- 419
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457325 [0819457329]
- Language:
- English
- Call no.:
- P63600/5752-1
- Type:
- Conference Proceedings
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