Blank Cover Image

Design of an integrated aerial image sensor

Author(s):
Antos, R. ( Shizuoka Univ. (Japan) )
Veis, M. ( Charles Univ. (Czech Republic) )
Liskova, E. ( Charles Univ. (Czech Republic) )
Aoyama, M. ( Shizuoka Univ. (Japan) )
Hamrle, J. ( Frontier Research System, RIKEN (Japan) )
Kimura, T. ( Frontier Research System, RIKEN (Japan) )
Gustafik, P. ( Shizuoka Univ. (Japan) )
Horie, M. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
Mistrik, J. ( Shizuoka Univ. (Japan) )
Yamaguchi, T. ( Shizuoka Univ. (Japan) )
Visnovsky, S. ( Shizuoka Univ. (Japan) and Charles Univ. (Czech Republic) )
Okamoto, N. ( Shizuoka Univ. (Jopan) )
7 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5752
Pub. Year:
2005
Page(from):
392
Page(to):
403
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457325 [0819457329]
Language:
English
Call no.:
P63600/5752-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Airy-like internal reflection series applied in scatterometry and simulations of gratings [5858-35]

Antos, R., Mistrik, J., Yamaguchi, T., Horie, M., Visnovsky, S.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Self-calibration of wafer scanners using an aerial image sensor

Hagiwara, T., Hamatani, M., Kondo, N., Suzuki, K., Nishinaga, H., Inoue, J., Kaneko, K., Higashibata, S.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry [5965-66]

Antos, R., Ohlidal, I., Mistrik, J., Yamaguchi, T., Visnovsky, S., Yamaguchi, S., Horie, M.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Aerial image sensor for self-calibration of wafer steppers

Hagiwara,T., Mizutani,H., Kondo,N., Inoue,J., Kaneko,K., Higashibata,S.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Spectral ellipsometry of binary optic gratings

Pistora, J., Yamaguchi, T., Vlcek, J., Mistrik, J., Horie, M., Smatko, V., Kovacova, E., Postava, K., Aoyama, M.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Integrated optical sensors for optoacoustic imaging of tissue

Dmochowski, P., Hayes-Gill, B. R., Li, C., Morgan, S. P., Clark, M., Crowe, J. A., Somekh, M. G.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Observation of coupled magnetic vortex structure dynamics by time-resolved magneto-optical Kerr effect microscopy

R. Antos, J. Hamrle, H. Masaki, T. Kimura, J. Shibata, Y. Otani

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Development of Vertically Integrated Imaging and Particle Sensors

Wyrsch, N., Miazza, C., Dunand, S., Shah, A., Blanc, N., Kaufmann, R., Cavalier, L., Anelli, G., Despeisse, M., Jarron, …

Materials Research Society
5 Conference Proceedings Aerial video reconnaissance using large sensor arrays

D. B. Pollock, T. E. Rogers, R. O. Klepfer, P. J. Reardon, C. N. Underwood, S. K. Pitalo

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Development of a Pulsing System with the Linac Based Slow Positron Beam

Tashiro, M., Honda, Y., Yamaguchi, T., Pujari, P.K., Kimura, N., Kozawa, T., Tagawa, S.

Trans Tech Publications
6 Conference Proceedings Integrated imaging sensors

Anderson,J.S., Kostrzewa,T., Cook,L.G., Baker,G., Radford,W.A., Jack,M.D., Finch,A., Kennedy,A., Kojiro,J.K., …

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Aerial-image microscopes for the inspection of defects in EUV masks

Barty, A., Taylor, J.S., Hudyma, R.M., Spiller, E.A., Sweeney, D.W., Shelden, G.V., Urbach, J.-P.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12