Automated CD SEM tilt-ready for primetime: a fast in-line methodology for differentiating lines vs. spaces
- Author(s):
Choi, Y.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Sung, M.-K. ( Samsung Electronics Co., Ltd. (South Korea) ) Lee, S.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Lee, J.-H. ( SungKyunKwan Univ. (South Korea) ) Park, J.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Choi, I.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Moon, S.-Y. ( Samsung Electronics Co., Ltd. (South Korea) ) Choi, S.-W. ( Samsung Electronics Co., Ltd. (South Korea) ) Han, W.-S. ( Samsung Electronics Co., Ltd. (South Korea) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XIX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5752
- Pub. Year:
- 2005
- Page(from):
- 351
- Page(to):
- 362
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457325 [0819457329]
- Language:
- English
- Call no.:
- P63600/5752-1
- Type:
- Conference Proceedings
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