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CD-AFM reference metrology at NIST and SEMATECH

Author(s):
  • Hayashi, H. ( Semiconducfor Co., Toshiba Corp. (Japan) )
  • Fukunaga, Y. ( Semiconducfor Co., Toshiba Corp. (Japan) )
  • Yamosaki, M. ( Semiconducfor Co., Toshiba Corp. (Japan) )
  • Nagai, T. ( Semiconducfor Co., Toshiba Corp. (Japan) )
  • Yamazaki, Y. ( Semiconducfor Co., Toshiba Corp. (Japan) )
Publication title:
Metrology, Inspection, and Process Control for Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5752
Pub. Year:
2005
Page(from):
324
Page(to):
336
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457325 [0819457329]
Language:
English
Call no.:
P63600/5752-1
Type:
Conference Proceedings

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