Blank Cover Image

Fabrication of nanometer sized features on non-flat substrates using a nano-imprint lithography process

Publication title:
Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5751
Pub. Year:
2005
Page(from):
994
Page(to):
1002
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457318 [0819457310]
Language:
English
Call no.:
P63600/5751-2
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Fabrication of Nano-Sized Gold Dot Array Using Bi-Layer Nano Imprint Lithography

Yang, K.Y., Hong, S.H., Lee, H., Choi, J.W.

Trans Tech Publications
7 Conference Proceedings Fabrication of fine pitch gratings by holography, electron beam lithography and nano-imprint lithography

D. Goodchild, A. Bogdanov, S. Wingar, B. Benyon, N. Kim, F. Shepherd

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Mask fabrication by nano-imprint lithography using antisticking layers

Schuiz,H., Osenberg,F., Engemann,J., Scheer,H.-C.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings Anti-Reflective Porous Silicon Features by Substrate Conformal Imprint Lithography for Silicon Photovoltaic Applications

G.J. Blayney, C. Zaradzki, Y. Liu, M.A. Mohd-Azmi, O.J. Guy

Trans Tech Publications
3 Conference Proceedings Fabrication of Step and Flash imprint lithography templates using commercial mask processes

Thompson, E., Rhyins, P.D., Voisin, R.D., Sreenivasan, S.V., Martin, P.M.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Fabrication of nano and micro optical elements by step and flash imprint lithography (Invited Paper) [6110-20]

Khusnatdinov, N, Doyle, G, Miller, M, Stacey, N, Watts, M, LaBrake, D L

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Fabrication of flexible grating sensing waveguide based on nano-imprint lithography and micro-replication process

Y. Liu, W. Tian, S. Zhang

Society of Photo-optical Instrumentation Engineers
10 Conference Proceedings Fabrication of grating waveguides based on nano-imprint lithography and silicon-mould replication techniques

Liu, Y., Esashi, M., Tian, W.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Fabrication and test of nano crossbar switches/MOSFET hybrid circuits by imprinting lithography

Z. Li, X. Li, O. A. A. Ohlberg, J. Straznicky, W. Wu

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Fabrication of Surface Nitridation Mask on GaAs Substrate for Nano-Lithography

Yamamoto, Yo, Saito, Kohji, Kondo, Toshiyuki, Maruyama, Takahiro, Naritsuka, Shigeya

Materials Research Society
6 Conference Proceedings Study on nano imprint lithography by the pre-exposure process (PEP)

Yoshiyuki Kono, Atsushi Sekiguchi, Yoshihiko Hirai, Shigeo Arasaki, Koichi Hattori

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Preparation of Electrodeposited Pt Nano Patterned Electrode using UV-Nano Imprinting Lithography

M. Saito, J. Mizuno, H. Nishikubo, H. Fujiwara, T. Homma

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12