Debris characterization and mitigation from microscopic laser-plasma tin-doped droplet EUV sources
- Author(s):
Aoki, T. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Kondo, H. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Matsunari, S. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Takase, H. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Gomei, Y. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Terashima, S. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) - Publication title:
- Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5751
- Pub. Year:
- 2005
- Page(from):
- 563
- Page(to):
- 571
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457318 [0819457310]
- Language:
- English
- Call no.:
- P63600/5751-1
- Type:
- Conference Proceedings
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