EUV mask blank activities at LETI: defect detection at 80 nm
- Author(s):
Miiler, M. ( Molecular Imprints, Inc. (USA) ) Doyle, G. ( Molecular Imprints, Inc. (USA) ) Stacey, N. ( Molecular Imprints, Inc. (USA) ) Xu, F. ( Molecular Imprints, Inc. (USA) ) Sreenivasan, S. V. ( Molecular Imprints, Inc. (USA) ) Watts, M. ( Molecular Imprints, Inc. (USA) ) LaBrake, D. L. ( Molecular Imprints, Inc. (USA) ) - Publication title:
- Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5751
- Pub. Year:
- 2005
- Page(from):
- 423
- Page(to):
- 434
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457318 [0819457310]
- Language:
- English
- Call no.:
- P63600/5751-1
- Type:
- Conference Proceedings
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