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Integrated deformable mirror on silicon for optical data storage

Author(s):
Publication title:
MOEMS Display and Imaging Systems III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5721
Pub. Year:
2005
Page(from):
159
Page(to):
169
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456953 [0819456950]
Language:
English
Call no.:
P63600/5721
Type:
Conference Proceedings

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