Integrated deformable mirror on silicon for optical data storage
- Author(s):
- Fanget, S. ( CEA-DRT-LETI (France) )
- Labeye, P.R. ( CEA-DRT-LETI (France) )
- Divoux, C. ( CEA-DRT-LETI (France) )
- Hugon, X. ( CEA-DRT-LETI (France) )
- Publication title:
- MOEMS Display and Imaging Systems III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5721
- Pub. Year:
- 2005
- Page(from):
- 159
- Page(to):
- 169
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456953 [0819456950]
- Language:
- English
- Call no.:
- P63600/5721
- Type:
- Conference Proceedings
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