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Characterization of chemically assisted ion beam etching and form birefringence structure fabrication in GaAs using SU-8

Author(s):
  • Pang, L. ( Univ. of California/San Diego (USA) )
  • Nezhad, M. ( Univ. of California/San Diego (USA) )
  • Levy, U. ( Univ. of California/San Diego (USA) )
  • Tsai, C. ( Univ. of California/San Diego (USA) )
  • Fainman, Y. ( Univ. of California/San Diego (USA) )
Publication title:
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5720
Pub. Year:
2005
Page(from):
252
Page(to):
260
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456946 [0819456942]
Language:
English
Call no.:
P63600/5720
Type:
Conference Proceedings

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