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Electron-beam lithography for micro- and nano-optical applications (Invited Paper)

Author(s):
Publication title:
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5720
Pub. Year:
2005
Page(from):
68
Page(to):
77
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456946 [0819456942]
Language:
English
Call no.:
P63600/5720
Type:
Conference Proceedings

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