Testing of MEMS/MOEMS/MNT devices and systems (Invited Paper)

Testing of MEMS/MOEMS/MNT devices and systems (Invited Paper)

Author(s):

Heeren, H.van ( EnablingM3 (Netherlands) )
El-Fatatry, A. ( SEIC/BAE SYSTEMS and Loughborough Univ. (United Kingdom) )
Paschalidou, L. ( Market Intelligence Consultant (United Kingdom) )
Salomon, P.R. ( 4M2C PATRIC SALOMON GmbH (Germany) )

Publication title:

MOEMS and Miniaturized Systems V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5719

Pub. Year:

2005

Page(from):

102

Page(to):

114

Pages:

13

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456939 [0819456934]

Language:

English

Call no.:

P63600/5719

Type:

Conference Proceedings

Details

TDL ID:	ZA00014936
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and Miniaturized Systems
Conf. info. (Number):	2005 : 5th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.25-2005.01.26

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