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BSOI MOEMS (Invited Paper)

Author(s):
Syms, R.R.A. ( Imperial College London (United Kingdom) )  
Publication title:
MOEMS and Miniaturized Systems V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5719
Pub. Year:
2005
Page(from):
83
Page(to):
94
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456939 [0819456934]
Language:
English
Call no.:
P63600/5719
Type:
Conference Proceedings

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