Applications and requirements for MEMS scanner mirrors

Applications and requirements for MEMS scanner mirrors

Author(s):

Wolter, A. ( Fraunhofer Institute for Photonic Microsystems (Germany) )
Hsu, S.-T. ( Fraunhofer Institute for Photonic Microsystems (Germany) )
Schenk, H. ( Fraunhofer Institute for Photonic Microsystems (Germany) )
Lakner, H.K. ( Fraunhofer Institute for Photonic Microsystems (Germany) )

Publication title:

MOEMS and Miniaturized Systems V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5719

Pub. Year:

2005

Page(from):

64

Page(to):

75

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456939 [0819456934]

Language:

English

Call no.:

P63600/5719

Type:

Conference Proceedings

Details

TDL ID:	ZA00014936
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and Miniaturized Systems
Conf. info. (Number):	2005 : 5th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.25-2005.01.26

Similar Items:

1 Conference Proceedings Improved layout for a resonant 2D micro scanning mirror with low operation voltages Wolter, A., Schenk, H., Gaumont, E., Lakner, H.K. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Fracture strength of SOI springs in MEMS micromirrors S.-T. Hsu, A. Wolter, W.-D. Owe, H. Schenk SPIE - The International Society of Optical Engineering
2 Conference Proceedings MEMS microscanning mirror for barcode reading: from development to production Wolter, A., Schenk, H., Gaumont, E., Lakner, H. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Damping analysis and measurement for a comb-drive scanning mirror Sandner, T., Klose, T., Wolter, A., Schenk, H., Lakner, H. K., Davis, W. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Performance and applications of a spectrometer with micromachined scanning grating Grueger, H., Wolter, A., Schuster, T., Schenk, H., Lakner, H.K. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Realization of a spectrometer with micromachined scanning grating Grueger, H., Wolter, A., Schuster, T., Schenk, H., Lakner, H.K. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Scanning 2D micromirror with enhanced flatness at high frequency [6114-24] Wolter, A., Klose, T., Hsu, S.-T., Schenk, H., Lakner, H. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Low-cost projection device with a 2D resonant microscanning mirror Roscher, K.-U., Graetz, H., Schenk, H., Wolter, A., Lakner, H. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Design optimization of an electrostatically driven micro scanning mirror Schenk,H., Wolter,A., Lakner,H. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Torsional stress, fatigue and fracture strength in silicon hinges of a micro scanning mirror Wolter, A., Schenk, H., Korth, H., Lakner, H. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Fabrication end-test of the micro scanning mirror Wolter, A., Gaumont, E., Korth, H., Schenk, H., Lakner, H. K. SPIE - The International Society of Optical Engineering	12 Conference Proceedings Bulk micromachined quasistatic torsional micromirror Kiessling, T., Wolter, A., Schenk, H., Lakner, H. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12