Interconnected multilevel microfluidic channels fabricated using low-temperature bonding of SU-8 and multilayer lithography

Interconnected multilevel microfluidic channels fabricated using low-temperature bonding of SU-8 and multilayer lithography

Author(s):

Peng, Z.-C. ( Louisiana State Univ. (USA) )
Ling, Z.-G. ( Louisiana State Univ. (USA) )
Goettert, J. ( Louisiana State Univ. (USA) )
Hormes, J. ( Louisiana State Univ. (USA) )
Lian, K. ( Louisiana State Univ. (USA) )

Publication title:

Microfluidics, bioMEMS, and medical microsystems III : 24-26 January 2005, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5718

Pub. Year:

2005

Page(from):

209

Page(to):

215

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456922 [0819456926]

Language:

English

Call no.:

P63600/5718

Type:

Conference Proceedings

Details

TDL ID:	ZA00014935
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Microfluidics, bioMEMS, and medical microsystems
Conf. info. (Number):	2005 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.24-2005.01.26

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