UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications

UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications

Author(s):

Yang, R. ( Louisiana State Univ. (USA) )
Jiang, J. ( Louisiana State Univ. (USA) )
Wang, W. ( Louisiana State Univ. (USA) )
Meng, W.J. ( Louisiana State Univ. (USA) )

Publication title:

MEMS/MOEMS Components and Their Applications II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5717

Pub. Year:

2005

Page(from):

175

Page(to):

184

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456915 [0819456918]

Language:

English

Call no.:

P63600/5717

Type:

Conference Proceedings

Details

TDL ID:	ZA00014934
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS/MOEMS Components and Their Applications
Conf. info. (Number):	2005 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.24-2005.01.25

Similar Items:

1 Conference Proceedings Micromolding of Pb and Zn With Surface Engineered LiGA Mold Inserts Cao, D.M., Guidry, D.J., Meng, W.J., Kelly, K.W. Materials Research Society	7 Conference Proceedings Injection molding using high-aspect-ratio microstructure mold inserts produced by LIGA technique Despa,M.S., Kelly,K.W., Collier,J.R. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Fabrication of LIGA mold inserts using a modified procedure Galhotra,V., Marques,C., Desta,Y.M., Kelly,K.W., Despa,M., Pendse,A., Collier,J. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Metal Micromolding With Surface Engineered Inserts Cao, D. M., Jiang, J., Meng, W. J. Materials Research Society
3 Conference Proceedings UV-LIGA microfabrication of a power relay based on electrostatic actuation Yang, R., Jeong, S.J., Wang, W. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Fabrication of integrated microlens array mold and mold insert for mass production Shyu, R.F., Weng, F.-T., Pan, C.-T., Yang, H.H. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Fabrication of MEMS Tonpilz Transducers Zhou, Q.F., Wang, L.-P., Gerber, G., Meyer, R. Jr.,, Tol, D. Van, Tadigadapa, S., Hughes, W.J., Trolier-McKinstry, S. Materials Research Society	10 Conference Proceedings Fabrication of single-mode optical fiber ferrule mold insert with 12 channels Yang,H., Vasile,M.J. SPIE - The International Society for Optical Engineering
5 Conference Proceedings Electroplated nickel mold insert for LIGA Galhotra,V., Sangishetty,V., Ma,E., Kelly,K.W. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Characteristics of a torsional resonator with two degrees of freedom fabricated by UV-LIGA Usuda, T., Basrour, S., Majjad, H., Coudevylle, J.R., de Labachelerie, M. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Realization of multifiber ferrale mold inserts fabricated by the LIGA process Shyu,R.F., Yang,H., Chou,M.-C. SPIE-The International Society for Optical Engineering	12 Conference Proceedings The masks fabricated by UV LIGA for excimer laser ablation and x-ray lithography Liang, J., Le, Z., Wang, W., Peng, L., Lan, W., Ming, A., Ye, J., Quan, B., Yao, J., Xuan, M., Wang, L. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12