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Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators

Author(s):
Olson, S. ( Univ. at Albany/SUNY (USA) )
Altemus, B. ( Univ. at Albany/SUNY (USA) )
Sankaran, B. ( Univ. at Albany/SUNY (USA) )
Tokranova, N. ( Univ. at Albany/SUNY (USA) )
Geer, R. ( Univ. at Albany/SUNY (USA) )
Castracane, J. ( Univ. at Albany/SUNY (USA) )
Xu, B. ( Univ. at Albany/SUNY (USA) )
2 more
Publication title:
MEMS/MOEMS Components and Their Applications II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5717
Pub. Year:
2005
Page(from):
167
Page(to):
174
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456915 [0819456918]
Language:
English
Call no.:
P63600/5717
Type:
Conference Proceedings

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